Learn More
This paper presents the design and realization of a three degrees of freedom (DOFs) displacement measurement system composed of Hall sensors, which is built for the XYθz displacement measurement of the short stroke stage of the reticle stage of lithography. The measurement system consists of three pairs of permanent magnets mounted on the same plane on the(More)
An investigation of a segmented annular coplanar capacitor is presented. We focus on its theoretical model, and a mathematical expression of the capacitance value is derived by solving a Laplace equation with Hankel transform. The finite element method is employed to verify the analytical result. Different control parameters are discussed, and each(More)
To determine the planar motion of a 6-DOF precision stage, a measurement system based on three Hall sensors is adopted to obtain the X, Y, Rz motions of the stage. The machining and assembly errors in the actual mechanical system, which are difficult to measure directly, cause the parameters in the model of the Hall measurement system to deviate from their(More)
We present an approach for an initial configuration design based on obscuration constraint and on-axis Taylor series expansion to realize the design of long working distance microscope (numerical aperture (NA) = 0.13 and working distance (WD) = 525 mm) with a low obscuration aspherical Schwarzschild objective in wide-spectrum imaging (λ = 400-900 nm).(More)
In this paper, a high resolution and response speed interrogation method based on a reflective-matched Fiber Bragg Grating (FBG) scheme is investigated in detail. The nonlinear problem of the reflective-matched FBG sensing interrogation scheme is solved by establishing and optimizing the mathematical model. A mechanical adjustment to optimize the(More)