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A particle characteristics diagnosis system (PCDS) was developed to measure nano-sized particle properties by a combination of particle beam mass spectrometry, scanning electron microscopy (SEM), and energy dispersive x-ray spectroscopy (EDS). It allows us to measure the size distributions of nano-sized particles in real time, and the shape and composition(More)
Molybdenum disulfide (MoS2), a well-known solid lubricant for low friction surface coatings, has recently drawn attention as an analogue two-dimensional (2D) material beyond graphene. When patterned to produce vertically grown, nanoflower-structures, MoS2 shows promise as a functional material for hydrogen evolution catalysis systems, electrodes for alkali(More)
Semiconducting two-dimensional (2D) materials, particularly extremely thin molybdenum disulfide (MoS2) films, are attracting considerable attention from academia and industry owing to their distinctive optical and electrical properties. Here, we present the direct growth of a MoS2 monolayer with unprecedented spatial and structural uniformity across an(More)
Layered molybdenum disulphide was grown at a low-temperature of 350 °C using chemical vapour deposition by elaborately controlling the cluster size. The molybdenum disulphide grown under various sulphur-reaction-gas to molybdenum-precursor partial-pressure ratios were examined. Using spectroscopy and microscopy, the effect of the cluster size on the layered(More)
A probability equation based on the proper assumptions of the particle trajectory and fundamental physics has been developed by analyze beam properties such as beam width and intensity distribution for an in situ particle monitor (ISPM). The radius coordinate which has the same intensity and portion of beam area for detection voltage range were analyzed to(More)
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