MOSFETs with gate length down to 17 nm are reported. To suppress the short channel effect, a novel self-aligned double-gate MOSFET, FinFET, is proposed. By using boron-doped Si0 4Ge0 6 as a gate… (More)
In this paper, we propose a novel operation of a MOSFET that is suitable for ultra-low voltage (0.6 V and below) VLSI circuits. Experimental demonstration was carried out in a Silicon-On-Insulator… (More)
While the selection of new "backbone" device structure in the era of post-planar CMOS is open to a few candidates, FinFET and its variants show great potential in scalability and manufacturability… (More)
High performance PMOSFETs with gate length as short as 18-nm are reported. A self-aligned double-gate MOSFET structure (FinFET) is used to suppress the short channel effect. A 45 nm gate-length PMOS… (More)
Thin-body transistors with silicide source/drains were fabricated with gate-lengths down to 15nm. Complementary low-barrier silicides were used to reduce contact and series resistance. Minimum… (More)
International Electron Devices Meeting. Technical…
2001
A simplified fabrication process for sub-20 nm CMOS double-gate FinFETs is reported. It is a more manufacturable process and has less overlap capacitance compared to the previous FinFET (1999, 2000).… (More)
Deep-sub-tenth micron MOSFETs with gate length down to 20 nm are reported. To improve the short channel effect immunities, a novel folded channel transistor structure is proposed. The quasi-planar… (More)
Abstract In the nanoscale regime, the double-gate MOSFET can provide superior short-channel behavior. For this structure, device scaling issues are explored. Gate length scaling will be limited by… (More)
N-channel double-gate metal-oxide-semiconductor field-effect transistor (MOSFET) FinFETs with gate and fin dimensions as small as 30 nm have been fabricated using a new, simplified process. Short… (More)
Next-generation information technologies will process unprecedented amounts of loosely structured data that overwhelm existing computing systems. N3XT improves the energy efficiency of abundant-data… (More)