Jean-Ochin Abrahamians

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—Typical methods of measuring mechanical properties at the micro-scale are destructive, and do not allow proper characterisation on resonant MEMS/NEMS. In this paper, a cartography of local stiffness variations on a suspended micro-membrane is established for the first time, by a tuning-fork-based dynamic force sensor inside a SEM. Experiments are conducted(More)
—In order to characterize the mechanical behavior of fragile resonant microelectromechanical systems (MEMS)/nanoelectromechanical systems (NEMS), nondestructive measurements are required. In this paper, a cartography of local stiffness variations on a suspended micromembrane is established for the first time, by a tuning-fork-based dynamic force sensor(More)
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