Jean-Ochin Abrahamians

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version on a funder's repository at a funder's request, provided it is not made publicly available until 12 months after publication. Abstract This paper reviews the state of the art of untethered, wirelessly actuated and controlled micro-robots. Research for such tools is being increasingly pursued to provide solutions for medical, biological and(More)
Typical methods of measuring mechanical properties at the micro-scale are destructive, and do not allow proper characterisation on resonant MEMS/NEMS. In this paper, a cartography of local stiffness variations on a suspended micromembrane is established for the first time, by a tuning-fork-based dynamic force sensor inside a SEM. Experiments are conducted(More)
In order to characterize the mechanical behavior of fragile resonant microelectromechanical systems (MEMS)/nanoelectromechanical systems (NEMS), nondestructive measurements are required. In this paper, a cartography of local stiffness variations on a suspended micromembrane is established for the first time, by a tuning-fork-based dynamic force sensor(More)
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