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This paper presents mass measurements of glycerine beads performed by means of laterally resonant micro-cantilevers. The transducer architecture is based on a resonant cantilever electrostatically coupled by two parallel placed electrodes. Previous to glycerine measurements, a calibration of the mass sensor has been performed by measuring a standard mass(More)
A new design of Spiking Neural Networks is proposed and fabricated using a 0.35 microm CMOS technology. The architecture is based on the use of both digital and analog circuitry. The digital circuitry is dedicated to the inter-neuron communication while the analog part implements the internal non-linear behavior associated to spiking neurons. The main(More)
An electromechanical model for a transducer based on a lateral resonating cantilever is described. The on-plane vibrations of the cantilever are excited electrostatically by applying DC and AC voltages from a driver electrode placed closely parallel to the cantilever. The model predicts the static deflection and the frequency response of the oscillation(More)
A microcantilever based platform for mass detection in the femtogram range has been integrated in the doped top silicon layer of a SOI substrate. The on-plane fundamental resonance mode of the cantilever is excited electrostatically and detected capacitively by means of two parallel placed electrodes in a two port configuration. An electromechanical model(More)
Francesc Pérez-Murano, Julien Arcamone, Marc Sansa, Jaume Verd, Arantxa Uranga, Gabriel Abadal, Núria Barniol, Marc van den Boogaart and Juergen Brugger 1 Instituto de Microelectronica de Barcelona CNM-IMB (CSIC), Campus UAB, 08193 Bellaterra (Barcelona), Spain. 2 Dept.Electronics Engineering, Universitat Autonoma de Barcelona, ETSE-UAB, 08193-Bellaterra(More)
A cantilever based Micro Electro Mechanical System (MEMS) for mass detection is presented. The sensor for multiple detections is composed by several cantilevers integrated monolithically with CMOS. Cantilevers are excited electrostatically to its resonance frequency. The oscillation of the cantilever is detected by a capacitive detection technique. Mass(More)