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We present the first measurement results from hybrid AlGaN-on-Si-based Extreme Ultraviolet (EUV) imagers with 10 µm pixel-to-pixel pitch. The 256x256 backside illuminated Focal Plane Arrays (FPAs) were hybridized to dedicated Si-based CMOS Readouts (ROICs). The AlGaN active layer with 40% Al concentration provides an intrinsic rejection of wavelengths(More)
A label-free biosensor based on localized surface plasmon resonance (LSPR) was developed. A multi-channel microfluidic chip was integrated with the sensor, providing referencing channel to minimize noise level and improving the throughput. With a CCD as a detector, a sensitivity of 10<sup>&#x2122;4</sup> RIU was demonstrated. The adsorption of S-layer(More)
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