Jaesang Lim

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The intelligent digital 3-axis IMU system integrated with the MEMS sensing cores, the signal processing electronics, and the network interface is presented. The MEMS sensing cores are fabricated by using the SBM (Sacrificial Bulk Micromachining) process. The fabricated sensing core accomplishes the high performance, high yield and high reliability by the(More)
This paper presents a lead-lag compensator design for a MEMS-fabricated microgyroscope. The microgyroscope is basically a high Q system, thus the bandwidth is limited to be narrow. To overcome the open-loop performance limitations, a feedback controller is designed to improve the resolution, bandwidth, linearity, and bias stability of the microgyroscope.(More)
This paper presents a feedback-controlled, MEMS-fabricated microaccelerometer. The microaccelerometer has received much commercial attraction, but its performance is generally limited. To improve the open-loop performance, a feedback controller is designed and experimentally evaluated. The feedback controller is applied to the x/y-axis microaccelerometer(More)
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