Jae Bin Lee

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To fabricate lateral-field excitation (LFE)-mode solid mounted resonator (SMR)-type film bulk acoustic resonators (FBARs), piezoelectric ZnO layers were deposited in an RF magnetron sputtering system. Control of the crystallinity, microstructure and electric properties of the piezoelectric layers was essential for fabricating high-quality LFE-mode SMR-type(More)
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