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Journals and Conferences
A MEMS surface-micromachined gyroscope integrated on a single 3/spl times/3 mm/sup 2/ chip with a 3 /spl mu/m BiCMOS process has 4 /spl mu/m-thick polysilicon structure, 5V 6 mA power supply,… (More)
This paper was invited as part of discussion on the extent to which gyroscope cost and performance are influenced by micromachining. The contribution here addresses a very low cost segment enabled by… (More)