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Geometry measurements are very important to monitor a machine part's health and performance. Optical measurement system have several advantages for the acquisition of a parts geometry: measurement speed, precision, point density and contactless operation. Measuring parts inside of assembled machines is also desirable to keep maintenance cost low. The(More)
With the aim to miniaturize and to reduce the cost, the increasing demand, regarding to advanced 3D-packages as well as high performance applications, accelerates the development of 3D-silicon integrated circuits. The trend to smaller and lighter electronics has highlighted many efforts towards size reduction and increased performance in electronic(More)
Increasing demand, regarding to advanced 3D-packages and high performance applications, accelerates the development of 3D-silicon integrated circuit, with the aim to miniaturize and to reduce the cost. Due to drastic dimension mismatches between interconnects, through-silicon-vias (TSV), and landing pads, the reliability of the systems and components are(More)
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