J. Schlobohm

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Geometry measurements are very important to monitor a machine part's health and performance. Optical measurement system have several advantages for the acquisition of a parts geometry: measurement speed, precision, point density and contactless operation. Measuring parts inside of assembled machines is also desirable to keep maintenance cost low. The(More)
Increasing demand, regarding to advanced 3D-packages and high performance applications, accelerates the development of 3D-silicon integrated circuit, with the aim to miniaturize and to reduce the cost. Due to drastic dimension mismatches between interconnects, through-silicon-vias (TSV), and landing pads, the reliability of the systems and components are(More)
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