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In this paper we present a new hybrid finite-element/component-modeling approach that can predict the pull-in and release behavior of MEMS switches orders of magnitude faster, and with significantly more behavioral detail, than traditional finite-element or formula-based approaches. The speed and detail allow exploration of the design space, guidance for(More)
This paper presents a comparison of the design, construction, and performance of broadband RF MEMS switches operating in the K-band from DC to 26.5 GHz and DC to 35 GHz. Both devices exploit proven elements from previous DC -7 GHz SPDT MEMS switch designs. Two different switch configurations have been investigated to address RF resonance deficiencies,(More)
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