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  • J. Roth
  • Conference Record of the 2004 IEEE Industry…
  • 2004
The majority of industrial plasma processing is conducted with glow discharges at pressures below 10 torr. This tends to limit plasma processing applications to high value workpieces as a result of the high capital cost of vacuum systems and the production constraints of batch processing. It has long been recognized that glow discharges would play a much(More)
Depth profiles of deuterium trapped in tungsten materials irradiated with low-energy D ions have been measured up to a depth of 7 μm using the D( 3 He,p) 4 He nuclear reaction at a 3 He energy varied from 0.69 to 4.0 MeV. It was found that D ion irradiation with ion energies well below the displacement threshold modifies the W structure to depths of up to(More)
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