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Integrated optical sensors make use of a p-n-junction for light intensity detection, typically. Because of the costs, additional optical components are not available in standard integration processes. Therefore, in higher level optical sensors extra optical components are not part of an integration. In this paper a concept for integration is proposed, which(More)
Integrated optical sensors make use of a p-n-junction for light intensity detection, typically. Because of the costs, additional optical components are not available in standard integration processes. Therefore, in higher level optical sensors extra optical components are not part of an integration. In this paper a concept for integration is proposed, which(More)
In this paper we present a microscale “Smart Dust” type system with a volume of 200 μm × 100 μm × 10 μm, called lablet. The lablet contains a 20 Hz low power clock generator, a sensor, electric actuators and a simple finite state machine to implement a predefined response to the sensor input. The system(More)
In this paper, we present a novel microscale &#x201C;Smart Dust&#x201D; type system designed to operate in aqueous solutions, with a volume of <inline-formula> <tex-math notation="LaTeX">$200~\mu \text{m} \,\, \times 100~\mu \text{m} \,\, \times $ </tex-math></inline-formula> 35 <inline-formula> <tex-math notation="LaTeX">$\mu \text{m}$(More)
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