J M Gao

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We report a nanoimprint lithography method combined with photolithography on a bi-layer polymer setup to define nano-worms laterally in nano-gratings and produce uniform worm-shaped polymeric nanoparticles in aqueous solution by dissolving water soluble sacrificial layer poly(vinyl alcohol) (PVA). Process control of the thin residue layer, SU-8 curing using(More)
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