J.J. Nainaparampil

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Lubrication of microelectromechanical systems (MEMS) became very critical as the devices became complex and its reliability began to deteriorate. In this paper, ionic liquids (ILs) with low volatility and high environmental stability were investigated as lubricants for sliding MEMS devices. A method that is based on atomic force microscopy (AFM) with a(More)
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