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Dimensional metrology for micro- and even nanometer-sized objects is becoming increasingly important in industry branches like semiconductor and optical industries as well as in the fields of mechanical engineering, biology and medicine. To achieve the required small uncertainties and probing flexibility new measurement systems have been developed in the(More)
This paper presents the characterization of a miniaturized displacement sensor based on the Inductosyn<sup>&#x00AE;</sup> principle. In comparison to commercially available large-scaled inductive sensors the proposed linear transducer is fabricated in thin-film technology enabling a signal period of 44 &#x03BC;m. In order to analyze the sensor(More)
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