Lithographic processing has been the key technology responsible for the rapid advances in microelectronics, but is typically not accessible to undergraduates. We have developed a maskless photolithographic system that can be assembled from a consumer projector and a trinocular microscope. This system allows students to design and print custom patterns into… (More)
We demonstrated high-index-contrast, waveguide-coupled As2Se3 chalcogenide glass resonators monolithically integrated on silicon fabricated using optical lithography and a lift-off process. The resonators exhibited a high intrinsic quality factor of 2×10(5) at 5.2 μm wavelength, which is among the highest values reported in on-chip mid-infrared (mid-IR)… (More)
In this article, we review our recent work on mid-infrared (mid-IR) photonic materials and devices fabricated on silicon for on-chip sensing applications. Pedestal waveguides based on silicon are demonstrated as broadband mid-IR sensors. Our low-loss mid-IR directional couplers demonstrated in SiN x waveguides are useful in differential sensing… (More)
Integrated photonics on flexible substrates and on-chip infrared spectroscopic sensing expand new applications for chalcogenide glasses beyond phase change data storage and moldable infrared optics. C halcogenide glasses (ChGs) refer to a broad family of inorganic amorphous materials containing one or more of the Group IV chalcogen elements, namely sulfur,… (More)
10.1 INTRODUCTION Chalcogenide glasses (ChGs) are well known for their high infrared (IR) transparency and amenability to fabrication in fiber and thin film forms, which makes them attractive candidates for mid-IR optical chemical and biological sensors. This chapter describes recent advances in the production of sensing devices from a variety of thin film… (More)
We quantify the thermo-optic response of chalcogenide glasses to 2µm laser irradiation using Shack-Hartmann thermal lensing metrology. Induced dioptric powers as strong as 0.21m-1 are observed for CW pump irradiances as low as 38.2 W/cm 2 .