J. Dafonseca

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The paper presents current technological achievements and associated characterizations of the mechanical, thermal and electrical properties of the assembly at wafer level of vertical power devices matrices. Based on direct bonding technology, metallic substrates are bonded to the Silicon active layer at wafer level to ensure back-side common electrode(More)
We demonstrate chip to wafer assembly based on aligned Cu-Cu direct bonding. A collective die surface preparation for direct bonding has implemented to develop dies direct bonding, defect free. An accurate pick and place equipment was adapted to ensure a particle free environment. After a damascene-like surface preparation, chips were bonded with less than(More)
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