J. C. Woicik

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Phase identification and the degree of crystallization in ultra-thin HfO<sub>2</sub> has been extremely challenging due to the &gt; 5 nm range order sensitivity of X-ray diffraction which is not sufficient to detect nanocrystallization. Yet detailed knowledge of the nanostructure is critical to the development of accurate performance models. Therefore,(More)
Extended x-ray absorption fine structure ~EXAFS! measurements of Co78Cr22 , Co86Cr12Ta2 , and Co86Cr12Pt2 films were made to investigate the local structure and chemistry around Ta and Pt atoms to determine their site distributions in these alloys. Comparisons between the measured data and data collected from experimental standards and calculated using(More)
Thermal stability of the high-k/In<inf>0.53</inf>Ga<inf>0.47</inf>As interface has been analyzed by both physical and electrical methods for the first time. It has been found that As-O and In-O bonds decompose and Ga-O bonds form above 400&#x00B0;C, as shown by XPS and corroborated by TEM, SIMS and EDX. Electrically, this interface decomposition resulted in(More)
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