Jürgen F Behnke

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A self-consistent kinetic model of plasma in the entire gap of a magnetron cylindrical discharge, with all quantities varying in radius and with the uniform magnetic field being directed axially, is presented. The discharge modeling is performed on the basis of a numerical solution of the spatially inhomogeneous Boltzmann kinetic equation together with(More)
Chemical reactions in a dielectric barrier discharge at medium pressure of 250-300 mbar have been studied in CH(4)/Ar and CH(4)/N(2) gas mixtures by means of mass spectrometry. The main reaction scheme is production of H(2) by fragmentation of CH(4), but also production of higher order hydrocarbon molecules such as C(n)H(m) with n up to 9 including(More)
The densities of argon metastable (3)P(2), and resonance (1)P(1), (3)P(1) states were measured along a cylindrical magnetron discharge radius by absorption spectroscopy using a narrow bandwidth single mode diode laser. The theoretical treatment includes calculations of the rates of numerous excitation and decay processes based on nonlocal electron kinetics,(More)
A cylindrical magnetron discharge (CMD) with two coaxial electrodes, a uniform axially directed magnetic field, and discharge ends closed by the shields biased at the cathode potential is considered. The presence of the shields creates axial inhomogeneity of plasma, which is taken into account in this study. At low pressures and small magnetic fields the(More)
The physical processes occurring in electrode regions and the positive column of a cylindrical magnetron discharge in crossed electric and magnetic fields are investigated based on the solution of the Boltzmann kinetic equation by a multiterm decomposition of the electron phase space distribution function in terms of spherical tensors. The influence of the(More)
A kinetic model of ionization waves in the inert gas discharge is constructed, which is based on the simultaneous solution of the kinetic equation for electrons and the continuity equations for ions and excited atoms. The model corresponds to a range of intermediate pressures and small currents, when elastic collisions dominate in the electron energy(More)
Resonance formation of the electron velocity distribution function (EDF) in an inert gas dc discharge at low pressures and small currents is analyzed on the basis of an accurate numerical solution of the Boltzmann kinetic equation in spatially periodic sinusoidally modulated striation-like fields. Calculations are performed for neon at pressures around 1(More)
The calculations of the electron distribution function (EDF) in striationlike, sinusoidally modulated electric fields were performed to determine the dependence on spatial period length. The calculations were done for a discharge in neon at pR=2 Torr cm, i/R=5 mA/cm, and electric field E/p=1.9 V cm(-1) Torr(-1). The presence of the resonances in the EDF and(More)
A general multiterm representation of the phase space electron distribution function in terms of spherical tensors is used to solve the Boltzmann kinetic equation in crossed electric and magnetic fields. The problem is formulated for an axisymmetric cylindrical magnetron discharge with the homogeneous magnetic field being directed axially and the electric(More)
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