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— A simple process has been developed which combines thick single-crystal Si micromechanical devices with a bipolar complimentary metal–oxide–semiconductor (BiCMOS) integrated circuit process. This merged process allows the integration of Si mechanical resonators as thick as 11 m with any integrated circuit process with the addition of only a single masking(More)
Inverter-fed drives will be used more and more frequently for variable speed drive applications with high dynamics. For saving braking energy and reduction of cooling effort it is useful to deploy self-commutated line side converters even in low power applications. The method proposed in this paper allows to synchronise the converter to the grid without(More)
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