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This paper describes the performance of a fluidic microrobot using Electrowetting on Dielectric (EWOD). A system to control the fluidic microrobot was designed, constructed and deployed in the NIST Mobile Microrobotics Challenge at ICRA 2011. The microrobots (0.1 M KCl and 550 μm diameter) demonstrated the ability to perform controlled maneuvers in(More)
Miniature legged robots have demonstrated fast locomotion at small sizes, but underactuation generally limits their performance in rapid turns and other dynamic maneuvers. In this work, the inertial effect of swinging a dynamic tail was studied as a method to achieve these rapid turns. An analytic model of a robot with a reaction wheel tail was developed to(More)
The first MEMS process integrating soft elastomers in a standard silicon-on-insulator (SOI) wafer without assembly has been demonstrated for use in microrobotic mechanisms. This process allows silicon and poly(dimethylsiloxane) (PDMS) features to be defined in-plane with feature sizes down to 2 µm. Test structures have been used to characterize the(More)
The goal of this research is to develop a lightweight, high bandwidth control actuator that can be integrated on a flapping wing nano air vehicle (NAV). Traditional control actuators for air vehicles including DC servomotors and shape memory alloy are either too heavy or too slow to control a fast moving NAV. This paper develops a new bio-inspired active(More)
Kapton strain-based hair sensors were designed and fabricated to measure flow on a micro air vehicle. The fabrication process is carried out using a single mask and a combination of cleanroom and regular lab room processing. The processing resulted in successful realization of 6.4 mm long sensors with high yield. Associated signal conditioning circuitry was(More)
This work demonstrates an all-elastomer MEMS capacitive strain sensor with high dynamic range (5000:1), and features an inexpensive molding microfabrication process. The sensor is comprised of conductive elastometric comb capacitors embedded in a dielectric. Two different sensor designs, lateral combs (LC) and transverse combs (TC), were developed to(More)
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