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Abstract Zirconia thin layers (250 nm) were deposited on stainless steel substrates using organo-metallic injection chemical vapour deposition (MOCVD) process with zirconium beta-diketonate as… (More)
This work deals with high-density integrated capacitors for output filters in future micro DC-DC converters. To reach high capacitance density, 3D structures were created in silicon with DRIE… (More)
Abstract High- k SrZrO 3 perovskite thin films, suitable for microelectronics applications were deposited under various conditions on plane Si (100) substrates by direct liquid injection… (More)
The continuous scaling down of devices dimensions, in silicon technology, imposes to replace silicon dioxide. Among the potential candidates for new capacitors, some perovskite structure materials… (More)