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Inhibitory effect of common microfluidic materials on PCR outcome
Abstract In this study, we established a simple method for evaluating the PCR compatibility of various common materials employed when fabricating microfluidic chips, including silicon, several kindsExpand
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A planar self-sacrificial multilayer SU-8-based MEMS process utilizing a UV-blocking layer for the creation of freely moving parts
This work presents the first-reported freely moving parts, including out-of-plane hinges and rotating parts, fabricated in SU-8 that require no post-development bonding step. The technology used is aExpand
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Deep-UV patterning of commercial grade PMMA for low-cost, large-scale microfluidics
Although PMMA can be exposed using a variety of exposure sources, deep-UV at 254 nm is of interest because it is relatively inexpensive. Additionally, deep-UV sources can be readily scaled to largeExpand
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Three-Axis Magnetic Field Induction Sensor Realized on Buckled Cantilever Plate
This work presents the fabrication and characterization of a three-axis induction sensor consisting of one planar microcoil, fixed on the substrate, and two microcoils fabricated on BbuckledExpand
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Polydimethylglutarimide (PMGI) as a sacrificial material for SU-8 surface-micromachining
SU-8 is finding increased use as a structural polymer MEMS material due to its biocompatibility, mechanical properties and low cost. The goal of this work is to expand the use of SU-8 through theExpand
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Self-sacrificial surface-micromachining using Poly(methyl methacrylate)
This paper explains the idea of self-sacrificial surface micromachining. In a self-sacrificial process, there is no distinction between structural and sacrificial layers. Instead, during patterning,Expand
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Three-dimensional parallelization of microfluidic droplet generators for a litre per hour volume production of single emulsions.
This paper looks at the design, fabrication and characterization of stackable microfluidic emulsion generators, with coefficients of variation as low as ~6% and with production rates as high as ~1 LExpand
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Design and optimization of a 3-coil resonance-based wireless power transfer system for biomedical implants
SUMMARYThis paper presents a resonance-based wireless power transfer system using a single layer of inductor coilwindings, in a pancake configuration, in order to obtain a compact system forExpand
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New Movable Plate for Efficient Millimeter Wave Vertical on-Chip Antenna
A new movable plate concept is presented in this paper to realize mm-wave vertical on-chip antennas through MEMS based post-processing steps in a CMOS compatible process. By virtue of its verticalExpand
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Simulation of a Polyimide Based Micromirror
The micro-­‐mirror is similar to a mechanical relay switch. The design consists of a bridge with two extended wings from the middle crea4ng a long pinned can4lever. Figure 2 shows such structure. areExpand
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