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  • Fu-Liang Yang, Hongli Chen, +11 authors Chenming Calvin Hu
  • Physics
  • Digest. International Electron Devices Meeting,
  • 2002
  • Low leakage and low active-power 25 nm gate length C-MOSFETs are demonstrated for the first time with a newly proposed Omega-(/spl Omega/) shaped structure, at a conservative 17-19 /spl Aring/ gateContinue Reading