Xuefeng Zeng12
Difeng Zhu9
12Xuefeng Zeng
9Difeng Zhu
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—A silicon micromachining method has been developed to fabricate on-chip high-performance suspended spiral inductors. The spiral structure of an inductor was formed with polysilicon and was suspended over a 30-m-deep cavity in the silicon substrate beneath. Copper (Cu) was electrolessly plated onto the polysilicon spiral to achieve low resistance. The Cu(More)
This paper extends the classical warping-based optical flow method to achieve accurate flow in the presence of spatially-varying motion blur. Our idea is to parameter-ize the appearance of each frame as a function of both the pixel motion and the motion-induced blur. We search for the flows that best match two consecutive frames, which amounts to finding(More)
1 Blurred image derivatives Recall from the main text that the observed images, I 1 and I 2 , are blurred by each other's spatially-varying kernels: B 1 (x) = (I 1 * k 2)(x), (1) B 2 (x) = (I 2 * k 1)(x), (2) where k 1 and k 2 are the motion blur kernels at the corresponding points in I 1 and I 2 , respectively. In effect, we have B 1 (x) = [I 1 * k 2 (x +(More)
Despite its compactness, the human eye can easily focus on different distances by adjusting the shape of its lens with the help of ciliary muscles. In contrast, traditional man-made optical systems achieve focusing by physical displacement of the lenses used. But in recent years, advances in miniaturization technology have led to optical systems that no(More)
— This paper presents a fabrication process that integrates polysilicon surface micromachining and deep reactive ion etching (DRIE) bulk silicon micromachining. The process takes advantage of the design flexibility of polysilicon surface micromachining and the deep silicon structures possible with DRIE. As a demonstration, a torsional actuator driven by a(More)
We present a microlens array consisting of multiple liquid-based tunable-focus microlenses omnidirectionally fabricated on a hemisphere, resulting in large field of view. Polymer bridge structure is formed between microlenses to reduce the stress and deformation in each lens structure. Each microlens in the array is formed via a water-oil interface at its(More)
Traditional optical systems utilize mechanical parts (e.g., gears, motors, and drivers) to allow adjustable focusing and magnification. Emerging variable-focus microlenses have exhibited the potential to miniaturize and advance optical systems without the need for mechanical parts, impacting significantly on a multitude of fields, such as cameras, [1](More)
—Programmable autonomous micromixers and mi-cropumps have been designed and realized via a merger between MEMS and microfluidic tectonics (FT). Advantages lever-aged from both fabrication platforms allow for relatively simple and rapid fabrication of these microfluidic components. Nickel (Ni) microstructures, driven by an external rotating magnetic field,(More)
—We report on polydimethylsiloxane (PDMS) mi-crolens arrays fabricated through liquid-phase photopolymer-ization and molding. The gist of this fabrication process is to form liquid menisci of variable radii of curvature at an array of apertures through pneumatic control, followed by photopoly-merization under ultraviolet radiance. The resultant polymerized(More)
In this paper we demonstrate, using a fabrication technique, liquid-phase photopolymerization (LP 3) for the relatively fast and low-cost integration of thick polymers and electroformed metal microstructures to develop a range of microfluidic components and systems. Liquid-phase UV-photosensitive polymers, similar to negative-tone photoresists, are used to(More)