Hisato Inaba

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This paper suggests the modeling methods of non-uniform substrate resistivity for substrate resistance extraction. Conventional substrate model of uniform resistivity for each substrate layer can cause about 40-80% resistance extraction errors. Though model of simulated doping profile theoretically provides fine accuracy, the doping profile cannot be(More)
This paper discusses modeling of non-uniform substrate re-sistivity for substrate resistance extraction. Though substrate resistivity of each substrate layer is frequently assumed to be uniform, doping profile of each substrate layer is not uniform. We present the extraction error of substrate resistance under uniform resistivity assumption. The resistivity(More)
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