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The effect of the use of the EGR system on the lubrication of a passenger car diesel engine was investigated. The higher the EGR rate, the more soot in the oil. And the most detrimental effect was… (More)
We investigated the resistance of a low-k SiOCH film structure to plasma-irradiation damage by comparing films deposited by neutral-beam enhanced chemical-vapour-deposition (NBECVD) and conventional… (More)
We developed a neutral-beam-enhanced method of chemical vapour deposition (NBECVD) to obtain a lower dielectric constant for the SiOCH interlayer dielectric film while maintaining a reasonable… (More)
To precisely control the dielectric constant and the structure of a low-k SiOC film, we have developed a neutral-beam-enhanced chemical vapour deposition (NBECVD) method. Using Ar NBECVD, we can… (More)
Ar neutral beam enhanced chemical vapor deposition can control the dielectric constant and film modulus of low-k SiOC deposited on Si substrates precisely because it avoids precursor dissociation due… (More)