Hiroshi Toshiyoshi

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Energy harvesting is an enabling technology for realizing an ambient power supply for wireless sensor nodes and mobile devices. By using flexible photovolta-ic cells and piezoelectric films, we can readily harvest ambient energy if flexible energy harvesters can be realized. Conventional silicon circuits, however, are not best suited to realizing flexible(More)
Angular Photoresist Vertical Comb Hinge We describe a single crystal silicon, 1x1 mm', scanning micromirror, which incorporates a novel angular vertical comb drive actuator. Results from our model for the angular vertical comb show that a 50% higher scan angle can be achieved when compared to a staggered vertical comb of equivalent dimensions. The(More)
—We have developed a novel batch-fabrication single-crystalline silicon micromirror bonding process to fabricate optically flat micromirror on polysilicon surface-micromachined two-dimensional (2-D) scanners. The electrostatically actuated 2-D scanner has a mirror area of 460 m 460 m and an optical scan angle of 7.5. Compared with micromirror made by(More)
—We report on the theory and experiments of scanning micromirrors with angular vertical comb-drive (AVC) actuators. Parametric analyses of rotational vertical comb-drive actuators using a hybrid model that combines two-dimensional finite-element solutions with analytic formulations are described. The model is applied to both AVC and staggered vertical(More)
Optical actuation of liquid droplets has been experimentally demonstrated for the first time using a novel optoelectrowetting (OEW) principle. The optoelectrowetting surface is realized by integrating a photoconductive material underneath a two-dimensional array of electrowetting electrodes. Contact angle change as large as 308 has been achieved when(More)
We report on a substantially improved process for which an array of optical MEMS devices (MOEMS) are batch transferred onto a quartz wafer such that through wafer beam scanning can be achieved. MEMS optical scanners are successfully fabricated, transferred, and actuated for out-of-plane beam steering. DC transfer curves of control devices on silicon and(More)
—In this paper, we present the design, fabrication, and measurements of a two-dimensional (2-D) optical scanner with electrostatic angular vertical comb (AVC) actuators. The scanner is realized by combining a foundry-based surface-mi-cromachining process (MultiUser MEMS Processes—MUMPs) with a three-mask deep-reactive ion-etching (DRIE) postfabri-cation(More)
We report a very simple and reliable method for making Self-Assembled Vertical Comb (SAVC) drive actuators by using the standard SOI bulk micro-machining processes. The initial angular offset of the movable combs is prepared by using the process stiction which occurs during drying process after sacrificial release. The optical scanner integrated with SAVC(More)
DEVICE DESIGN We present the design, fabrication, and demonstration of a fully decoupled 2D gimbal scanner with angular vertical comb (AVC) actuators. The device is realized by combining a foundry surface-micromachining process (MUMPs) with a 3-mask deep-reactive-ion-etching (DRIE) post process. Surface-micromachining provides versatile mechanical design(More)