Hiroshi Toshiyoshi

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In this paper, we present the design, fabrication, and measurements of a two-dimensional (2-D) optical scanner with electrostatic angular vertical comb (AVC) actuators. The scanner is realized by combining a foundry-based surface-micromachining process (Multi-User MEMS Processes—MUMPs) with a three-mask deep-reactive ion-etching (DRIE) postfabrication(More)
This paper presents the first successful demonstration of all-optical MEMS (microelectromechanical system) fiber endoscope for OCT (optical coherence tomography) measurement. A MEMS optical scanner for spatial light modulation has been assembled in the endoscope probe head (φ 6mm) with optical components and a photovoltaic cell. Actuation energy for the(More)
Optical actuation of liquid droplets has been experimentally demonstrated for the first time using a novel optoelectrowetting (OEW) principle. The optoelectrowetting surface is realized by integrating a photoconductive material underneath a two-dimensional array of electrowetting electrodes. Contact angle change as large as 308 has been achieved when(More)
This paper presents an innovative high-frequency- based biosensor, which combines both microwave detection and microfluidic network for time-efficient and accurate biological analysis. It is composed of a coplanar waveguide with a microfluidic channel placed on top. With the help of an appropriate de-embedding technique and modeling of the measurements, the(More)
Angular Photoresist Vertical Comb Hinge We describe a single crystal silicon, 1x1 mm', scanning micromirror, which incorporates a novel angular vertical comb drive actuator. Results from our model for the angular vertical comb show that a 50% higher scan angle can be achieved when compared to a staggered vertical comb of equivalent dimensions. The(More)
Energy harvesting is an enabling technology for realizing an ambient power supply for wireless sensor nodes and mobile devices. By using flexible photovoltaic cells and piezoelectric films, we can readily harvest ambient energy if flexible energy harvesters can be realized. Conventional silicon circuits, however, are not best suited to realizing flexible(More)
We report on a microelectromechanical-systems (MEMS)-based 1 wavelength-selective switch (WSS) with excellent open-loop stability and repeatability. The optical power fluctuation of the WSS is 0.0035 dB over a 3.5-h period. The variation of optical power during 30 ON–OFF switching periods is 0.0026 dB. Experiments were also performed on the analog MEMS(More)
This paper reports on novel polysilicon surface-micromachined one-dimensional (1-D) analog micromirror arrays fabricated using Sandia’s ultraplanar multilevel MEMS technology-V (SUMMiT-V) process. Large continuous DC scan angle (23.6 optical) and low-operating voltage (6 V) have been achieved using vertical comb-drive actuators. The actuators and torsion(More)
This paper presents an effective method of linearizing the electrostatic transfer characteristics of micromachined two–dimensional (2-D) scanners. The orthogonal scan angles of surface micromachined polysilicon scanner are controlled by using quadrant electrodes for electrostatic actuation. By using a pair of differential voltages over a bias voltage, we(More)