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This paper presents an innovative high-frequency- based biosensor, which combines both microwave detection and microfluidic network for time-efficient and accurate biological analysis. It is composed of a coplanar waveguide with a microfluidic channel placed on top. With the help of an appropriate de-embedding technique and modeling of the measurements, the(More)
Angular Photoresist Vertical Comb Hinge We describe a single crystal silicon, 1x1 mm', scanning micromirror, which incorporates a novel angular vertical comb drive actuator. Results from our model for the angular vertical comb show that a 50% higher scan angle can be achieved when compared to a staggered vertical comb of equivalent dimensions. The(More)
Energy harvesting is an enabling technology for realizing an ambient power supply for wireless sensor nodes and mobile devices. By using flexible photovolta-ic cells and piezoelectric films, we can readily harvest ambient energy if flexible energy harvesters can be realized. Conventional silicon circuits, however, are not best suited to realizing flexible(More)
Optical actuation of liquid droplets has been experimentally demonstrated for the first time using a novel optoelectrowetting (OEW) principle. The optoelectrowetting surface is realized by integrating a photoconductive material underneath a two-dimensional array of electrowetting electrodes. Contact angle change as large as 308 has been achieved when(More)
This paper presents a novel configuration of a MEMS scanning endoscope that is actuated by external optical modulation. Light at a wavelength in the 1550nm range is used to modulate a scanning MEMS mirror, and wavelength of 1310nm, commonly used for optical coherence tomography (OCT), is used for the probe beam. This novel approach provides for the(More)
We propose a low-cost transparent display pixel using the MEMS electrostatic Fabry-Perot interferometer. A thin plastic sheet of polyethylene naphthalate was laminated over a glass substrate with an optical cavity, and the electrostatic deformation of the film controlled the color of transmitting light. Color change between dark-white and bright green was(More)
—This paper presents an effective method of linearizing the electrostatic transfer characteristics of micromachined two–di-mensional (2-D) scanners. The orthogonal scan angles of surface micromachined polysilicon scanner are controlled by using quadrant electrodes for electrostatic actuation. By using a pair of differential voltages over a bias voltage, we(More)
—In this paper, we present the design, fabrication, and measurements of a two-dimensional (2-D) optical scanner with electrostatic angular vertical comb (AVC) actuators. The scanner is realized by combining a foundry-based surface-mi-cromachining process (MultiUser MEMS Processes—MUMPs) with a three-mask deep-reactive ion-etching (DRIE) postfabri-cation(More)