Hiroshi Toshiyoshi

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Energy harvesting is an enabling technology for realizing an ambient power supply for wireless sensor nodes and mobile devices. By using flexible photovolta-ic cells and piezoelectric films, we can readily harvest ambient energy if flexible energy harvesters can be realized. Conventional silicon circuits, however, are not best suited to realizing flexible(More)
We report a very simple and reliable method for making Self-Assembled Vertical Comb (SAVC) drive actuators by using the standard SOI bulk micro-machining processes. The initial angular offset of the movable combs is prepared by using the process stiction which occurs during drying process after sacrificial release. The optical scanner integrated with SAVC(More)
—A shoe insole pedometer, which consists of a piezo-electric energy harvester and a 2 V organic pedometer circuit, has been developed as a first step toward the application of flexible large-area energy harvesting. A pseudo-CMOS 14 bit step counter records the number of steps up to 16383 steps using the harvested power. To increase the noise margin of the(More)
SUMMARY Chemical sensors are one of the oldest fields of research closely related to the semiconductor technology. From the Ion-Sensitive Field-Effect Transistors (ISFET) in the 70's, through Micro-Electro-Mechanical-System (MEMS) sensors from the end of the 80's, chemical sensors are combining in the 90's MEMS technology with LSI intelligence to devise(More)
We report an equivalent circuit model for MEMS (mi-croelectromechanical systems) electrostatic actuator using open-source circuit simulator Qucs (quite universal circuit simulator). Electrostatic force, equation of motion, and Kirchhoff's laws are implemented by using the EDD (equation defined device) function of Qucs. Mathematic integral operation in the(More)