Hiroshi Toshiyoshi

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Energy harvesting is an enabling technology for realizing an ambient power supply for wireless sensor nodes and mobile devices. By using flexible photovolta-ic cells and piezoelectric films, we can readily harvest ambient energy if flexible energy harvesters can be realized. Conventional silicon circuits, however, are not best suited to realizing flexible(More)
Angular Photoresist Vertical Comb Hinge We describe a single crystal silicon, 1x1 mm', scanning micromirror, which incorporates a novel angular vertical comb drive actuator. Results from our model for the angular vertical comb show that a 50% higher scan angle can be achieved when compared to a staggered vertical comb of equivalent dimensions. The(More)
Optical actuation of liquid droplets has been experimentally demonstrated for the first time using a novel optoelectrowetting (OEW) principle. The optoelectrowetting surface is realized by integrating a photoconductive material underneath a two-dimensional array of electrowetting electrodes. Contact angle change as large as 308 has been achieved when(More)
This paper presents a novel configuration of a MEMS scanning endoscope that is actuated by external optical modulation. Light at a wavelength in the 1550nm range is used to modulate a scanning MEMS mirror, and wavelength of 1310nm, commonly used for optical coherence tomography (OCT), is used for the probe beam. This novel approach provides for the(More)
—In this paper, we present the design, fabrication, and measurements of a two-dimensional (2-D) optical scanner with electrostatic angular vertical comb (AVC) actuators. The scanner is realized by combining a foundry-based surface-mi-cromachining process (MultiUser MEMS Processes—MUMPs) with a three-mask deep-reactive ion-etching (DRIE) postfabri-cation(More)
—This paper presents an effective method of linearizing the electrostatic transfer characteristics of micromachined two–di-mensional (2-D) scanners. The orthogonal scan angles of surface micromachined polysilicon scanner are controlled by using quadrant electrodes for electrostatic actuation. By using a pair of differential voltages over a bias voltage, we(More)
We report on a substantially improved process for which an array of optical MEMS devices (MOEMS) are batch transferred onto a quartz wafer such that through wafer beam scanning can be achieved. MEMS optical scanners are successfully fabricated, transferred, and actuated for out-of-plane beam steering. DC transfer curves of control devices on silicon and(More)
DEVICE DESIGN We present the design, fabrication, and demonstration of a fully decoupled 2D gimbal scanner with angular vertical comb (AVC) actuators. The device is realized by combining a foundry surface-micromachining process (MUMPs) with a 3-mask deep-reactive-ion-etching (DRIE) post process. Surface-micromachining provides versatile mechanical design(More)
—This paper reports on novel polysilicon surface-mi-cromachined one-dimensional (1-D) analog micromirror arrays fabricated using Sandia's ultraplanar multilevel MEMS technology -V (SUMMiT-V) process. Large continuous DC scan angle (23.6 optical) and low-operating voltage (6 V) have been achieved using vertical comb-drive actuators. The actuators and torsion(More)