Development of a monolithic pixel detector based on SOI (silicon on insulator) technology was started at KEK in 2005. The substrate of the SOI wafer is used as a radiation sensor. At end of 2005, we submitted several test-structure group (TEG) chips for the 150 nm, fully depleted CMOS process. The TEG designs and preliminary results are presented.
SUMMARY A precise measurement of Cosmic Microwave Background (CMB) provides us rich information about the universe. In particular , its asymmetric polarization patterns, B-modes, are smoking gun signature of inflationary universe. Magnitude of the B-modes is order of 10 nK. Its measurement requires a high sensitive millimeter-wave telescope with a large… (More)