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  • Mitsuteru Kimura, Fumitoshi Sakurai, Hirao Ohta, Tomoyuki Terada
  • Computer Science, Materials Science, Engineering
  • Microelectron. J.
  • 2006 (First Published: 1 February 2007)
  • New structural Pirani gauge-type thermal vacuum sensor with a microheater and two pn junction diodes, Th-A and Th-B, as a high-sensitive temperature sensor working like a thermistor formed on aContinue Reading