Henry Baltes

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The sensing behavior of polymer-coated resonant cantilevers for mass-sensitive detection of volatile organic compounds was investigated. Industrial complementary metal oxide semiconductor (CMOS) technology combined with subsequent CMOS-compatible micromachining was used to fabricate a single-chip system comprising the transducers and all necessary driving(More)
Research activity in chemical gas sensing is currently directed towards the search for highly selective (bio)chemical layer materials, and to the design of arrays consisting of different partially selective sensors that permit subsequent pattern recognition and multi-component analysis. Simultaneous use of various transduction platforms has been(More)
The rst micromachined bimorph organic ciliary array with on-chip CMOS circuitry is presented. This device is composed of an 8 8 array of cells each having four orthogonally oriented actuators in an overall die size of 9:4mm 9:4mm. The polyimide based actuators were fabricated directly above the selection and drive circuitry. Selection and activation of(More)
The first micromachined bimorph organic ciliary array with on-chip CMOS circuitry is presented. This ciliary array is composed of an 8 8 array of cells each having four orthogonally oriented actuators in an overall die size of 9.4 9.4 mm. The polyimide-based actuators were fabricated directly above the selection and drive circuitry. Selection and activation(More)
Signal degradation and an array size dictated by the number of available interconnects are the two main limitations inherent to standalone microelectrode arrays (MEAs). A new biochip consisting of an array of microelectrodes with fully-integrated analog and digital circuitry realized in an industrial CMOS process addresses these issues. The device is(More)
The paper reviews the state-of-the-art in the field of CMOS-based microelectromechanical systems (MEMS). The different CMOS MEMS fabrication approaches, preCMOS, intermediate-CMOS, and post-CMOS, are summarized and examples are given. Two microsystems fabricated with post-CMOS micromachining are presented, namely a mass-sensitive chemical sensor for(More)
1999 Electronic Components and Technology Conference Abstract A novel ball bond process optimization method based on a thermal signal from an integrated aluminum microsensor is reported. The in-situ temperature during the ball bonding is measured and analyzed. The ultrasonic period shows distinct features corresponding to the scrubbing of the ball on the(More)
New details on selectivity and sensitivity of fully integrated CMOS-based capacitive chemical microsensor systems are revealed. These microsystems have been developed to detect volatile organics in ambient air and rely on polymeric sensitive layers. The sensitivity and selectivity changes induced by thickness variation of the sensitive polymer layer allow(More)