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- Heiko Weichert, Philipp Benz, Sergio Di Liberto
- IEEE 58th Holm Conference on Electrical Contacts…
- 2012
Motor Protection Circuit Breakers (MPCB) are used in multi motor applications with Variable Frequency Drives (VFD). Devices positioned load side of a drive failed after only several months through… (More)
- Kirsten Ruck, Heiko Weichert, Steffen Hornig, Frank Finger, Goeran Fleischer, Dave Hetzer
- SPIE Advanced Lithography
- 2007
Controlling a very tight CD budget in Photolithography is one of the challenges of the next technology nodes. The Post
Exposure Bake (PEB) process is known as one of the main Litho contributors to… (More)
- Jianshun Zhang, C. Y. Shaw, +4 authors Heiko Weichert
- 1996
- Ruslana Radchuk, Volodymyr Radchuk, +5 authors Hans Werner Weber
- 2007
- Uwe Kramer, Goeran Fleischer, Thomas Marschner, Steffen Hornig, Heiko Weichert, Dave Hetzer
- SPIE Advanced Lithography
- 2006
With critical dimensions in microelectronics devices shrinking to 70nm and below, CD metrology is becoming more and more critical, and additional measurement information will be needed, especially… (More)
Advanced DRAM manufacturing demands rigorous and tight process control using high measurement precision, accurate, traceable and high throughput metrology solutions. Scatterometry is one of the… (More)
- Tadatoshi Tomita, Heiko Weichert, +4 authors Junichi Kitano
- Advanced Lithography
- 2009
Immersion lithography has been developed for 45nm technology node generation during the last several years. Currently, IC manufacturers are moving to high volume production using immersion… (More)
Der Einsatz aviarer vitelliner Antikorper als immunologische Sekundarreagenzien erfordert die Uberprufung ihrer Eignung unter qualitativen und quantitativen Aspekten. Die „unblutige“ Praparation der… (More)