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Motor Protection Circuit Breakers (MPCB) are used in multi motor applications with Variable Frequency Drives (VFD). Devices positioned load side of a drive failed after only several months through… (More)
Controlling a very tight CD budget in Photolithography is one of the challenges of the next technology nodes. The Post Exposure Bake (PEB) process is known as one of the main Litho contributors to… (More)
With critical dimensions in microelectronics devices shrinking to 70nm and below, CD metrology is becoming more and more critical, and additional measurement information will be needed, especially… (More)
Advanced DRAM manufacturing demands rigorous and tight process control using high measurement precision, accurate, traceable and high throughput metrology solutions. Scatterometry is one of the… (More)
Immersion lithography has been developed for 45nm technology node generation during the last several years. Currently, IC manufacturers are moving to high volume production using immersion… (More)
Der Einsatz aviarer vitelliner Antikorper als immunologische Sekundarreagenzien erfordert die Uberprufung ihrer Eignung unter qualitativen und quantitativen Aspekten. Die „unblutige“ Praparation der… (More)