Hector J. De Los Santos

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A novel dielectric resonator (DR) resonant frequency tuning concept implemented, for the first time, in a micro-electro-mechanical-systems (MEMS) “Lithography, Electroplating and Molding” (LIGA) process, is presented. The complete system, except for the DR, is manufactured in the LIGA process. A description of the structure, consisting of a(More)
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