Harrie A. C. Tilmans

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The design, fabrication and performance of vacuum-encapsulated electrostatically driven polysilicon resonating beams, 210-510 p m long, 100 pm wide, and 1.5 p n thick, are described. The shortest beams have a fundamental frequency of 324 kHz, a gauge factor of 2400 and a quality factor of 600 at cavity pressures of 0.15 mbar. Intrinsic quality factors of 18(More)
This paper describes the vanous design aspects for rmcromechatucal sensors consut-mg of a structure with encapsulated budt-m resonant strain gauges Analytical models are used to investigate the effect of device parameters on the behavlour of a pressure sensor and a force sensor The analyses mdl-cate that the sealing cap can have a strong degrading effect on(More)
– New semiconductor technologies, used in passive microwave applications, allow the integration of passives with high quality factors and the fabrication of novel RF-MEMS components for switches and tunable capacitors and resonators. The use of these technologies results in a strong reduction of the size and the power consumption of wearable microwave(More)
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