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Cycle life testing of smart power switches requires significant hardware effort to provide the required ohmic-inductive load patterns. A new reliability test system for research purposes is therefore introduced that generates arbitrary current waveforms to emulate inductive switching behavior. This allows flexible cycle stress testing of integrated power(More)
We propose an approach for the numerical modeling of a laser ablation (LA) process on silicon targets. The work is motivated by the increasing application of lasers in the separation of ultra-thin power semiconductors. In order to optimize the process, reduce the energy cost per laser pulse and minimize the extension of the thermally induced damage, a(More)
  • R Ginthor-Kalcsics, H Eder, G R Straub, Weiss
  • 1995
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