Hai Xia

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We report on the development and testing of a proof of principle water temperature measurement system deployed on an unmanned aerial system (UAS), for field measurements of thermal discharges into water. The primary elements of the system include a quad-copter UAS to which has been integrated, for the first time, both a thermal imaging infrared (IR) camera(More)
A new joint mechanical and electrical simulation platform of a motion stage (reticle or wafer stage) was introduced of a step-and-scan lithography. In this platform the motion stage control object model represented in the form of a state-space model was extracted from its finite element (FE) model, which was then inserted into the other control models built(More)
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