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Performance improvement of manufacturing systems in the semiconductor industry involves interdisciplinary expertise, such as physical modeling, mechanical design, electrical control, and even material science. Integration of these different disciplines is a challenging problem in the semiconductor industry. The paper presents a conceptual approach to(More)
In this paper, a thorough mathematical analysis is proposed for designing and tuning fuzzy proportional ± integral± derivative (FZ-PID) control in order to achieve a better performance and simpler design. The quantitative model of FZ-PID, derived for the mathematical analysis and gain design, consists of a nonlinear relay and a nonlinear proportional ±(More)
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