H. Vander Meeren

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In recent years, integrated high-density capacitors have gained a lot of interest for RF and mixed signal IC applications. In this paper, we discuss technological options for integrated capacitors with capacitance densities up to 30fF/mum<sup>2</sup>. The capacitive structures where realized with dielectric materials such as Bi-Ta-O, Sr-Ta-O or(More)
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