H.M. Anderson

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  • H.M. Anderson
  • 2000 Digest of the LEOS Summer Topical Meetings…
  • 2000
Frequency-modulated infrared diode laser absorption spectroscopy (IRLAS) and full-spectrum CCD-based optical emission spectroscopy (OES) are two powerful new tools for plasma diagnostics. This presentation focuses on the use of these diagnostics in plasma etch processing used for semiconductor manufacturing. In particular, IRLAS is finding extensive use in(More)
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