H. A. C. Tilmans

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A systematic investigation of the influence of the process parameters temperature, pressure, total gas flow, and SiH2Cl2 :NH3 gas flow ratio on the residual stress, the refractive index, and its nonuniformity across a wafer, the growth rate, the film thickness nonuniformity across a wafer, and the Si/N incorporation ratio of low pressure chemical vapor(More)
Planar array antennas are attractive for use in future automotive radar systems due to their flexibility in design and control of radar beams. The complexity and cost of a radar front-end phased array can be decreased by applying a beam-steering/switching concept, which reduces the number of parallel RF and baseband signal paths. RF-microelectromechanical(More)
This document summarizes the results of the RF MEMS roadmapping project ARRRO (applied research roadmap for micro and nano systems). This project has been financed by the European Commission within the 6th Framework Programme. The paper presents some excerpts of the project regarding the (1) RF MEMS product roadmap with the example of RF MEMS switches, (2)(More)
0026-2714/$ see front matter 2012 Elsevier Ltd. A http://dx.doi.org/10.1016/j.microrel.2012.06.029 ⇑ Corresponding author. E-mail address: tilmans@imec.be (H.A.C. Tilmans). This paper reviews various approaches to package MEMS, illustrated mainly with examples from imec. Wafer-level or 0-level packaging is mostly dealt with. The role the package plays in(More)
Several microsystem applications require hermetic or semi- hermetic packages. It is for this reason mandatory to be able to check the hermeticity of these packages. The standard tests, using gross leak and fine leak, work very well for large cavities, but might give erroneous results for small cavities as typically used for MEMS. We discussed different(More)
In the past years, the RF-MEMS activities have focused on the development of generic technology platforms integrating switches as well as tunable and fixed passives components. This is in strict opposition to a former device-centered development of the RF-MEMS technologies. Fruitful efforts were put at IMEC in the reliability analysis and modeling of the(More)
In this study, finite element modelling (FEM) is used to estimate the stresses induced by the package on a high precision silicon resonator. A link between the induced stresses and strains at different temperatures and the shift in the resonance frequency is presented. In order to accentuate the effects of the package on the resonance frequency of the(More)
The goal of this research is to design and fabricate a very sensitive MEMS-based magnetic field sensor for space applications. The challenge is to reach the required sensitivity: measuring magnetic fields from a few nT to about 60000nT with sub-nano Tesla accuracy. The device studied in this paper is based on a classical resonating Xylophone Bar(More)
RF-MEMS is a disruptive technology, commonly regarded as key for future telecommunication systems as it potentially alleviates several of the natural trade-offs presented by current telecommunication systems. This new technology however does not percolate in the industry by lack of realized reliability. This can be attributed to a lack of understanding of(More)