Guohu Zhang

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We have grown 300 mm silicon single crystals using a 28" hot zone with 200 kg charge size. The mechanical strength of silicon seeds was tested and a new style seed and chuck were developed for safer operation. Oxygen concentration and radial gradient (ORG) were controlled to /spl plusmn/2.5 ppma between 33 and 23 ppma and to less than 5% respectively.(More)
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