George Tsirogiannis

We don’t have enough information about this author to calculate their statistics. If you think this is an error let us know.
Learn More
In semiconductor manufacturing, continuous on-line monitoring prevents production stop and yield loss. The challenges towards this accomplishment are: 1) the complexity of lithography machines which are composed of hundreds of mechanical and optical components, 2) the high rate and volume data acquisition from different lithography and metrology machines,(More)
  • 1