George Totir

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FinFET devices are demonstrated with multiple fins (>2) at a 120nm pitch using e-beam lithography to address some key challenges of FINFETs for 32nm node technologies and beyond. Target Vt's are achieved by proper halo design using 20nm fins. Vt scatter due to Fin width variation is greatly reduced with a reduced halo. When such a realistic fin pitch is(More)
The adsorption, thermal chemistry, and photoreaction dynamics of methyl iodide on the (2x2) magnetite termination of natural single-crystal hematite have been investigated by time-of-flight quadrupole mass spectrometry (TOF-QMS), temperature-programmed desorption (TPD) and Auger electron spectroscopy (AES). The methyl iodide thermal desorption spectra,(More)
Photovoltaic devices were fabricated at IBM TJ Watson Research Center using a research line designed to run different substrate types concurrently. The process knowledge gained from CMOS IC fabrication is applied to solar cell fabrication to create cells with plated Cu front metallization, Al back contacts, and PECVD SiN ARC. The interaction between(More)
Scanning capacitance microscopy (SCM) has been used to generate two dimensional images of emitters formed using various doping techniques on polished and textured silicon photovoltaic cells. SCM has the advantage of high spatial resolution and sensitivity to carrier concentrations in the range of 10<sup>14</sup> &#x2013; 10<sup>20</sup>(More)
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