Gary Starkweather

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This paper presents likely the world's smallest electrostatic visible light highly space-efficient transmissive micro-optical switches (TMOS) for an integrated MEMS optical display system. Each TMOS represents one pixel with 150µm×150µm spacing in a display module. It is demonstrated that a zigzag electrostatic actuator of 47µm×160µm size can achieve a(More)
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