Gary Rubloff

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While there are numerous types of electronic learning environments including collaboratories, construction toolkits, systems with " scaffolding " and simulations, it is difficult to find authoring tools to build these systems. We have developed an application framework for constructing simulation-based learning environments called SimPLE (Simulated(More)
Reviewing past events has been useful in many domains. Videotapes and flight data recorders provide invaluable technological help to sports coaches or aviation engineers. Similarly, providing learners with a readable recording of their actions may help them monitor their behavior, reflect on their progress, and experiment with revisions of their(More)
We have developed physically-based dynamic simulators relevant to semiconductor manufacturing processes, which realistically reflect the time-dependent behavior of equipment, process, sensor, and control systems using commercial simulation software (VisSim TM) under Windows. Following on their successful research use for engineering design, we are applying(More)
Chitosan is a naturally derived polymer with applications in a variety of industrial and biomedical fields. Recently, it has emerged as a promising material for biological functionalization of microelectromechanical systems (bioMEMS). Due to its unique chemical properties and film forming ability, chitosan serves as a matrix for the assembly of(More)
Real-time, in situ chemical sensing has been applied to achieve reaction metrology and advanced process control in a low pressure tungsten chemical vapor deposition process based on WF 6 and SiH 4 reactants ͑silane reduction process͒. Using mass spectrometry as the sensor to detect both product generation (H 2) and reactant depletion (SiH 4) at wafer(More)
Chitosan offers a unique set of properties that suggest its potential for interfacing biological components into electronic devices for lab-on-a-chip (LOC) applications. Specifically, chitosan's pH-responsive film-forming properties allow it to be electrodeposited as a stable thin film in response to localized cathodic signals. In addition, the(More)
—A physically-based dynamic simulator has been constructed to investigate the time-dependent behavior of equipment, process, sensor, and control systems for rapid thermal chemical vapor deposition (RTCVD) of polysilicon from SiH 4. The simulator captures the essential physics and chemistry of mass transport, heat transfer, and chemical kinetics of the RTCVD(More)
We have investigated the performance and potential benefit of acoustic sensing for real-time monitoring and closed loop control of binary gas mixture compositions delivered from low vapor pressure metalorganic sources. Two solid phase sources were investigated in the presence of H 2 as a carrier gas: (1) trimethylindium (TMI) and (2) bis(cyclopentadienyl)(More)
Process gases were sampled from the outlet of a tungsten chemical vapor deposition ͑CVD͒ reactor into an Inficon Composer™ acoustic sensor for in situ chemical gas sensing and real-time film thickness metrology. Processes were carried out on an Ulvac W CVD cluster tool at 10 Torr from 340 to 400 °C using a H 2 /WF 6 gas mixture. Sampled gases were(More)