Garth Berriman

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This article describes the design, fabrication and testing of a new XY nanopositioning stage constructed from a single sheet of piezoelectric material. The approach involves direct ultrasonic machining of a piezoelectric sheet to create flexural and actuator features. An industrial inkjet printer is then used to create electrode features by printing Nitric(More)
Maskless optical lithography is a technique for writing patterns into an optically sensitive material (photoresist) without the use of a photomask. The patterning process involves exposing selected areas of the photoresist film to the sensitizing light to produce the desired pattern. Unfortunately, the exposure pattern required to produce the desired(More)
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