Gabriel Vidal-Alvarez

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This paper demonstrates laterally vibrating lithium niobate (LN) microelectromechanical (MEMS) resonators operating at 500 MHz with an electromechanical coupling coefficient (k<inf>t</inf><sup>2</sup>) around 30% &#x2014; the highest ever attained for this class of resonators. This accomplishment is made possible by the use of direct bonding of bulk X-cut(More)
This paper reports the integration of a bottom electrode in thin films of Y-cut lithium niobate (LN) on silicon to demonstrate high performance lamb-wave (S0 mode) and thickness-shear-mode (TSM) resonators. The LN resonator is sandwiched between top and bottom electrodes and attained high coupling (kt<sup>2</sup>) &#x003E; 6% when excited in S0 mode and(More)
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