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X-Cut Lithium Niobate Laterally Vibrating MEMS Resonator With Figure of Merit of 1560
This letter reports on the design, fabrication, and testing of an X-cut lithium niobate laterally vibrating resonator operating around 50 MHz and exhibiting a record figure of merit–FoM = product ofExpand
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Laterally vibrating lithium niobate MEMS resonators with 30% electromechanical coupling coefficient
This paper demonstrates laterally vibrating lithium niobate (LN) microelectromechanical (MEMS) resonators operating at 500 MHz with an electromechanical coupling coefficient (kt2) around 30% — theExpand
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Investigation of Electromechanical Coupling and Quality Factor of X-Cut Lithium Niobate Laterally Vibrating Resonators Operating Around 400 MHz
In this paper we present laterally vibrating resonators (LVRs) based on X-cut lithium niobate (LN) exhibiting a maximum quality factor <inline-formula> <tex-math notation="LaTeX">$({Q})$Expand
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Resonant Microelectromechanical Receiver
This paper reports a practical demonstration of a proposed resonant microelectromechanical receiver for low power wake-up receiver (WuRx) applications. The proposed system is made of three mainExpand
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Ultra-low-power and high sensitivity resonant micromechanical receiver
This paper describes the proposed architecture and the analytical optimization of an ultra-low-power and high sensitivity Resonant Micromechanical Receiver (RMR) to be used in wake-up radios. TheExpand
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High-Figure-of-Merit X-Cut Lithium Niobate MEMS Resonators Operating Around 50 MHz for Large Passive Voltage Amplification in Radio Frequency Applications
This article reports on the modeling, design, fabrication, and testing of high-performance X-cut lithium niobate (LN) laterally vibrating resonators (LVRs) operating around 50 MHz. The objective ofExpand
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Delay lines based on a suspended thin film of X-cut lithium niobate
We report on the fabrication, experimental characterization, and theoretical modeling of delay lines fabricated on a lithium niobate X-cut thin film substrate. We demonstrate the feasibility ofExpand
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Integration of bottom electrode in Y-cut lithium niobate thin films for high electromechanical coupling and high capacitance per unit area MEMS resonators
This paper reports the integration of a bottom electrode in thin films of Y-cut lithium niobate (LN) on silicon to demonstrate high performance lamb-wave (S0 mode) and thickness-shear-mode (TSM)Expand
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CMOS-MEMS switches based on back-end metal layers
Display Omitted MEMS switches integrated in a CMOS technology using Back-End layers (based on aluminum).Easy and reproducible fabrication process.Abrupt behavior (5mV/decade), good ION/IOFF ratioExpand
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X-Cut Lithium Niobate Series-Parallel Resonator Configuration Boosts Passive Voltage Amplification for Wake-Up Receivers to 46 V/V
This work reports on the use of X-cut Lithium Niobate (LN) microelectromechanical resonators in a series-parallel configuration (L-network) to boost passive voltage amplification in asynchronousExpand
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