Gabriel Abadal

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Shadow masking (also known as nanostencil lithography, SL) is a well known technique to fabricate patterns on a surface. It is a versatile method that can be used in a variety of applications. There has been recently a strong interest regarding the use of shadow masks, mostly related to combinatorial materials science, organic based device fabrication, as(More)
Teknillinen korkeakoulu Elektroniikan, tietoliikenteen ja automaation tiedekunta Mikro-ja nanotekniikan laitos Name of the dissertation Microelectromechanical resonators for frequency reference and frequency conversion applications Abstract Microelectromechanical systems (MEMS) have been used in sensor applications for more than three decades. With(More)